A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction

Betul Unlusu; Kayne M. Smith; M. Yousuff Hussaini; Lev D. Gelb; Susan D. Allen

doi:10.1166/jctn.2007.2332

A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction

Betul Unlusu, Kayne M. Smith, M. Yousuff Hussaini, Lev D. Gelb, Susan D. Allen

Research output: Contribution to journal › Article › peer-review

Abstract

Two-dimensional molecular dynamics simulations are carried out to examine the significance of energy transfer medium (ETM)-contaminant particle interaction for laser cleaning. Cleaning efficiencies at different temperatures are determined for the cases where laser light is absorbed by the substrate in the presence of a wetting or a non-wetting ETM. It is shown that a strong particle-ETM interaction is needed to facilitate cleaning when the dry laser cleaning (DLC) mechanism is not effective. The contribution of the DLC mechanism to cleaning in cases of wetting and non-wetting ETMs is also investigated via simulations where laser light is absorbed by the particle as well as the substrate.

Original language	American English
Journal	Journal of Computational and Theoretical Nanoscience
Volume	4
DOIs	https://doi.org/10.1166/jctn.2007.2332
State	Published - May 2007

Keywords

laser cleaning
molecular simulations
particle contamination
semiconductor manufacturing

Disciplines

Physics

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Cite this

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title = "A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction",

abstract = " Two-dimensional molecular dynamics simulations are carried out to examine the significance of energy transfer medium (ETM)-contaminant particle interaction for laser cleaning. Cleaning efficiencies at different temperatures are determined for the cases where laser light is absorbed by the substrate in the presence of a wetting or a non-wetting ETM. It is shown that a strong particle-ETM interaction is needed to facilitate cleaning when the dry laser cleaning (DLC) mechanism is not effective. The contribution of the DLC mechanism to cleaning in cases of wetting and non-wetting ETMs is also investigated via simulations where laser light is absorbed by the particle as well as the substrate.",

keywords = "laser cleaning, molecular simulations, particle contamination, semiconductor manufacturing",

author = "Betul Unlusu and Smith, {Kayne M.} and Hussaini, {M. Yousuff} and Gelb, {Lev D.} and Allen, {Susan D.}",

note = "PREFACE A Special Issue on Bio-Inspired Computing: Theories and Applications Guest Editors: Yongli Mi, Guangzhao Cui, Ning Li, Linqiang Pan, and Yan-Feng Wang J. Comput. Theor. Nanosci. 4, (i-ii) (2007) [ Abstract] [ Full Text - PDF] [ Purchase Article]",

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doi = "10.1166/jctn.2007.2332",

language = "American English",

volume = "4",

journal = "Journal of Computational and Theoretical Nanoscience",

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T1 - A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction

AU - Unlusu, Betul

AU - Smith, Kayne M.

AU - Hussaini, M. Yousuff

AU - Gelb, Lev D.

AU - Allen, Susan D.

N1 - PREFACE A Special Issue on Bio-Inspired Computing: Theories and Applications Guest Editors: Yongli Mi, Guangzhao Cui, Ning Li, Linqiang Pan, and Yan-Feng Wang J. Comput. Theor. Nanosci. 4, (i-ii) (2007) [ Abstract] [ Full Text - PDF] [ Purchase Article]

PY - 2007/5

Y1 - 2007/5

N2 - Two-dimensional molecular dynamics simulations are carried out to examine the significance of energy transfer medium (ETM)-contaminant particle interaction for laser cleaning. Cleaning efficiencies at different temperatures are determined for the cases where laser light is absorbed by the substrate in the presence of a wetting or a non-wetting ETM. It is shown that a strong particle-ETM interaction is needed to facilitate cleaning when the dry laser cleaning (DLC) mechanism is not effective. The contribution of the DLC mechanism to cleaning in cases of wetting and non-wetting ETMs is also investigated via simulations where laser light is absorbed by the particle as well as the substrate.

AB - Two-dimensional molecular dynamics simulations are carried out to examine the significance of energy transfer medium (ETM)-contaminant particle interaction for laser cleaning. Cleaning efficiencies at different temperatures are determined for the cases where laser light is absorbed by the substrate in the presence of a wetting or a non-wetting ETM. It is shown that a strong particle-ETM interaction is needed to facilitate cleaning when the dry laser cleaning (DLC) mechanism is not effective. The contribution of the DLC mechanism to cleaning in cases of wetting and non-wetting ETMs is also investigated via simulations where laser light is absorbed by the particle as well as the substrate.

KW - laser cleaning

KW - molecular simulations

KW - particle contamination

KW - semiconductor manufacturing

UR - http://www.aspbs.com/ctn/contents-ctn2007.htm#v4n3

U2 - 10.1166/jctn.2007.2332

DO - 10.1166/jctn.2007.2332

M3 - Article

VL - 4

JO - Journal of Computational and Theoretical Nanoscience

JF - Journal of Computational and Theoretical Nanoscience

ER -

A Molecular Dynamics Study of Laser-Assisted Cleaning: Energy Transfer Medium-Containment Particle Interaction

Abstract

Keywords

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