A molecular dynamics study of laser-assisted cleaning: Energy transfer medium-contaminant particle interaction

Betul Unlusu, Kayne M. Smith, M. Yousuff Hussaini, Lev D. Gelb, Susan D. Allen

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)488-493
Number of pages6
JournalJournal of Computational and Theoretical Nanoscience
Volume4
Issue number3
StatePublished - May 2007
Externally publishedYes

ASJC Scopus Subject Areas

  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Computational Mathematics
  • Electrical and Electronic Engineering

Keywords

  • Laser cleaning
  • Molecular simulations
  • Particle contamination
  • Semiconductor manufacturing

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