@article{0304b27a141f4646b2189c8bdc243a88,
title = "A molecular dynamics study of laser-assisted cleaning: Energy transfer medium-contaminant particle interaction",
keywords = "Laser cleaning, Molecular simulations, Particle contamination, Semiconductor manufacturing",
author = "Betul Unlusu and Smith, \{Kayne M.\} and Hussaini, \{M. Yousuff\} and Gelb, \{Lev D.\} and Allen, \{Susan D.\}",
year = "2007",
month = may,
language = "English",
volume = "4",
pages = "488--493",
journal = "Journal of Computational and Theoretical Nanoscience",
issn = "1546-1955",
publisher = "American Scientific Publishers",
number = "3",
}