@inproceedings{8a7075b33c104d74a9f662f832a507cf,
title = "Advanced dry and steam laser cleaning of opaque and transparent critical substrates",
keywords = "De-ionized water, Isopropyl alcohol, Nanosecond TEA CO laser, Opaque and transparent critical substrates, Sub-micron and micron sized particles, Time-resolved optical microscopy and interferometric techniques",
author = "Sergey Kudryashov and Shishir Shukla and Kevin Lyon and Allen, {Susan D.}",
year = "2006",
doi = "10.1117/12.669613",
language = "English",
isbn = "0819463264",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "High-Power Laser Ablation VI",
note = "High-Power Laser Ablation VI ; Conference date: 07-05-2006 Through 12-05-2006",
}