Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces

Sergey I. Kudryashov; Susan D. Allen

doi:10.1109/cleo.2005.202263

Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces

Sergey I. Kudryashov, Susan D. Allen

Arkansas State University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	2005 Conference on Lasers and Electro-Optics, CLEO
Publisher	Optical Society of America (OSA)
Pages	1751-1753
Number of pages	3
ISBN (Print)	1557527954, 9781557527950
DOIs	https://doi.org/10.1109/cleo.2005.202263
State	Published - 2005
Externally published	Yes
Event	2005 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, United States Duration: May 22 2005 → May 27 2005

Publication series

Name	2005 Conference on Lasers and Electro-Optics, CLEO
Volume	3

Conference

Conference	2005 Conference on Lasers and Electro-Optics, CLEO
Country/Territory	United States
City	Baltimore, MD
Period	5/22/05 → 5/27/05

ASJC Scopus Subject Areas

General Engineering

Access to Document

10.1109/cleo.2005.202263

Cite this

Kudryashov, S. I., & Allen, S. D. (2005). Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces. In 2005 Conference on Lasers and Electro-Optics, CLEO (pp. 1751-1753). Article CThL6 (2005 Conference on Lasers and Electro-Optics, CLEO; Vol. 3). Optical Society of America (OSA). https://doi.org/10.1109/cleo.2005.202263

Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces. / Kudryashov, Sergey I.; Allen, Susan D.
2005 Conference on Lasers and Electro-Optics, CLEO. Optical Society of America (OSA), 2005. p. 1751-1753 CThL6 (2005 Conference on Lasers and Electro-Optics, CLEO; Vol. 3).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Kudryashov, SI & Allen, SD 2005, Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces. in 2005 Conference on Lasers and Electro-Optics, CLEO., CThL6, 2005 Conference on Lasers and Electro-Optics, CLEO, vol. 3, Optical Society of America (OSA), pp. 1751-1753, 2005 Conference on Lasers and Electro-Optics, CLEO, Baltimore, MD, United States, 5/22/05. https://doi.org/10.1109/cleo.2005.202263

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author = "Kudryashov, {Sergey I.} and Allen, {Susan D.}",

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isbn = "1557527954",

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ER -

Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces

Publication series

Conference

ASJC Scopus Subject Areas

Access to Document

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Cite this