Ambient atmosphere effect on dry laser cleaning efficiencies for sub-micron particles on critical surfaces

Sergey I. Kudryashov, Susan D. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationConference on Lasers and Electro-Optics, CLEO 2005
PublisherOptical Society of America
ISBN (Print)1557527709, 9781557527707
StatePublished - 2005
Externally publishedYes
EventConference on Lasers and Electro-Optics, CLEO 2005 - Baltimore, MD, United States
Duration: May 22 2005May 22 2005

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceConference on Lasers and Electro-Optics, CLEO 2005
Country/TerritoryUnited States
CityBaltimore, MD
Period5/22/055/22/05

ASJC Scopus Subject Areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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