@inproceedings{16940a774b7b4543bce30ee0740040b8,
title = "Carbon dioxide and excimer laser ablation of parylene",
author = "Yang, {Yun Yen J.} and Lee, {Shyan Jer} and Allen, {Susan D.}",
year = "1989",
language = "English",
isbn = "1557520860",
series = "CONFERENCE ON LASERS AND ELECTRO-0PTICS",
publisher = "Publ by IEEE",
pages = "264--265",
editor = "Anon",
booktitle = "CONFERENCE ON LASERS AND ELECTRO-0PTICS",
note = "Summaries of Papers Presented at the Conference on Lasers and Electro-Optics ; Conference date: 24-04-1989 Through 28-04-1989",
}