| Original language | English |
|---|---|
| Pages | 36-38 |
| Number of pages | 3 |
| State | Published - 1984 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Engineering
DEPOSITION, MICROSTRUCTURE AND PROPERTIES OF LCVD SiC FILMS.
F. Shaapur, S. Allen
Research output: Contribution to conference › Paper › peer-review