| Original language | English |
|---|---|
| Pages | 36-38 |
| Number of pages | 3 |
| State | Published - 1984 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Engineering
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DEPOSITION, MICROSTRUCTURE AND PROPERTIES OF LCVD SiC FILMS.
- F. Shaapur
- , S. Allen
- University of Southern California
Research output: Contribution to conference › Paper › peer-review