Emission spectroscopy of plasmas generated in CO2 laser etching of fused silica

K. C. Hsiao, Yun Yen J. Yang, Susan D. Allen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationCONFERENCE ON LASERS AND ELECTRO-0PTICS
Editors Anon
PublisherPubl by IEEE
Pages430-431
Number of pages2
ISBN (Print)1557520860
StatePublished - 1989
Externally publishedYes
EventSummaries of Papers Presented at the Conference on Lasers and Electro-Optics - Baltimore, MD, USA
Duration: Apr 24 1989Apr 28 1989

Publication series

NameCONFERENCE ON LASERS AND ELECTRO-0PTICS

Conference

ConferenceSummaries of Papers Presented at the Conference on Lasers and Electro-Optics
CityBaltimore, MD, USA
Period4/24/894/28/89

ASJC Scopus Subject Areas

  • General Engineering

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