Excimer laser ablation of aluminum nitride

Janet K. Lumpp, Susan D. Allen

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)218-225
Number of pages8
JournalJournal of Materials Research
Volume12
Issue number1
DOIs
StatePublished - 1997
Externally publishedYes

ASJC Scopus Subject Areas

  • General Materials Science
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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