Excimer laser ablation of aluminum nitride

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	218-225
Number of pages	8
Journal	Journal of Materials Research
Volume	12
Issue number	1
DOIs	https://doi.org/10.1557/JMR.1997.0029
State	Published - 1997
Externally published	Yes

ASJC Scopus Subject Areas

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title = "Excimer laser ablation of aluminum nitride",

author = "Lumpp, \{Janet K.\} and Allen, \{Susan D.\}",

year = "1997",

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AU - Lumpp, Janet K.

AU - Allen, Susan D.

PY - 1997

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DO - 10.1557/JMR.1997.0029

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EP - 225

JO - Journal of Materials Research

JF - Journal of Materials Research

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