@article{19366e560fff47248fad0f9fc54a6ac5,
title = "Excimer laser machining and metallization of vias in aluminum nitride",
keywords = "Ablation, AlN, Aluminum metallization, Aluminum nitride, Copper metallization, Excimer laser, Micromachining, Via",
author = "Lumpp, {Janet K.} and Allen, {Susan D.}",
year = "1997",
month = aug,
doi = "10.1109/96.618223",
language = "English",
volume = "20",
pages = "241--246",
journal = "IEEE Transactions on Components Packaging and Manufacturing Technology Part B",
issn = "1070-9894",
number = "3",
}