@inproceedings{0b7bb6af7ad54c8c815464b9471e3539,
title = "Fluence dependence of excimer laser ablation of AIN",
author = "Lumpp, {Janet K.} and Coretsopoulos, {Christopher N.} and Allen, {Susan D.}",
year = "1994",
language = "English",
isbn = "1558992227",
series = "Materials Research Society Symposium Proceedings",
publisher = "Publ by Materials Research Society",
pages = "213--218",
editor = "Peter Borgesen and Jensen, {Klavs F.} and Pollak, {Roger A.}",
booktitle = "Electronic Packaging Materials Science VII",
note = "Proceedings of the Fall 1993 MRS Meeting ; Conference date: 29-11-1993 Through 03-12-1993",
}