High deposition rate laser direct writing of Al on Si

H. W. Lee, S. D. Allen

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)2087-2089
Number of pages3
JournalApplied Physics Letters
Volume58
Issue number19
DOIs
StatePublished - 1991
Externally publishedYes

ASJC Scopus Subject Areas

  • Physics and Astronomy (miscellaneous)

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