| Original language | English |
|---|---|
| Pages | 198-199 |
| Number of pages | 2 |
| State | Published - 1985 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Engineering
LASER-ASSISTED CHEMICAL ETCHING OF SiO//2.
- B. T. Dai
- , S. D. Allen
- , B. S. Agrawalla
Research output: Contribution to conference › Paper › peer-review