Laser Assisted Particle Removal 'Dry' Cleaning of Critical Surfaces

S. D. Allen; A. S. Miller; S. J. Lee

doi:10.1016/S0921-5107(96)01884-3

Laser Assisted Particle Removal 'Dry' Cleaning of Critical Surfaces

S. D. Allen, A. S. Miller, S. J. Lee

Research output: Contribution to journal › Article › peer-review

Abstract

Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and around the particles. The laser energy is absorbed in the energy transfer medium, either directly or via conduction from the substrate, explosively evaporating the condensed medium and propelling the particles off the substrate. The effect of the amount of energy transfer medium, water in this case, has been studied and a technique developed for monitoring the condensation and amount of water condensed on the substrate.

Original language	American English
Journal	Materials Science and Engineering: B
Volume	49
DOIs	https://doi.org/10.1016/S0921-5107(96)01884-3
State	Published - Sep 1997
Externally published	Yes

Keywords

laser processing
silicon processing
surface contamination

Disciplines

Physical Sciences and Mathematics

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title = "Laser Assisted Particle Removal 'Dry' Cleaning of Critical Surfaces",

abstract = " Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and around the particles. The laser energy is absorbed in the energy transfer medium, either directly or via conduction from the substrate, explosively evaporating the condensed medium and propelling the particles off the substrate. The effect of the amount of energy transfer medium, water in this case, has been studied and a technique developed for monitoring the condensation and amount of water condensed on the substrate.",

keywords = "laser processing, silicon processing, surface contamination",

author = "Allen, {S. D.} and Miller, {A. S.} and Lee, {S. J.}",

note = "Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and ...",

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T1 - Laser Assisted Particle Removal 'Dry' Cleaning of Critical Surfaces

AU - Allen, S. D.

AU - Miller, A. S.

AU - Lee, S. J.

N1 - Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and ...

PY - 1997/9

Y1 - 1997/9

N2 - Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and around the particles. The laser energy is absorbed in the energy transfer medium, either directly or via conduction from the substrate, explosively evaporating the condensed medium and propelling the particles off the substrate. The effect of the amount of energy transfer medium, water in this case, has been studied and a technique developed for monitoring the condensation and amount of water condensed on the substrate.

AB - Laser assisted particle removal (LAPR) is a technique for removing minute particles from surfaces using an energy transfer medium condensed under and around the particles. The laser energy is absorbed in the energy transfer medium, either directly or via conduction from the substrate, explosively evaporating the condensed medium and propelling the particles off the substrate. The effect of the amount of energy transfer medium, water in this case, has been studied and a technique developed for monitoring the condensation and amount of water condensed on the substrate.

KW - laser processing

KW - silicon processing

KW - surface contamination

UR - https://www.sciencedirect.com/science/article/pii/S0921510796018843

U2 - 10.1016/S0921-5107(96)01884-3

DO - 10.1016/S0921-5107(96)01884-3

M3 - Article

SN - 1873-4944

VL - 49

JO - Materials Science and Engineering: B

JF - Materials Science and Engineering: B

ER -

Laser Assisted Particle Removal 'Dry' Cleaning of Critical Surfaces

Abstract

Keywords

Disciplines

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