Laser-assisted particle removal from silicon surfaces

S. J. Lee; K. Imen; S. D. Allen

doi:10.1016/0167-9317(93)90212-N

Laser-assisted particle removal from silicon surfaces

S. J. Lee, K. Imen, S. D. Allen

University of Iowa

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	145-157
Number of pages	13
Journal	Microelectronic Engineering
Volume	20
Issue number	1-2
DOIs	https://doi.org/10.1016/0167-9317(93)90212-N
State	Published - Mar 1993
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Keywords

Contamination
Laser
Particle
Semiconductor

Access to Document

10.1016/0167-9317(93)90212-N

Cite this

@article{a6437a7aeae04335b31f1ebec526ab7b,

title = "Laser-assisted particle removal from silicon surfaces",

keywords = "Contamination, Laser, Particle, Semiconductor",

author = "Lee, {S. J.} and K. Imen and Allen, {S. D.}",

year = "1993",

month = mar,

doi = "10.1016/0167-9317(93)90212-N",

language = "English",

volume = "20",

pages = "145--157",

journal = "Microelectronic Engineering",

issn = "0167-9317",

number = "1-2",

}

TY - JOUR

T1 - Laser-assisted particle removal from silicon surfaces

AU - Lee, S. J.

AU - Imen, K.

AU - Allen, S. D.

PY - 1993/3

Y1 - 1993/3

KW - Contamination

KW - Laser

KW - Particle

KW - Semiconductor

UR - http://www.scopus.com/inward/record.url?scp=0027553825&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0027553825&partnerID=8YFLogxK

U2 - 10.1016/0167-9317(93)90212-N

DO - 10.1016/0167-9317(93)90212-N

M3 - Article

AN - SCOPUS:0027553825

SN - 0167-9317

VL - 20

SP - 145

EP - 157

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-2

ER -

Laser-assisted particle removal from silicon surfaces

ASJC Scopus Subject Areas

Keywords

Access to Document

Other files and links

Cite this