| Original language | English |
|---|---|
| Pages (from-to) | 145-157 |
| Number of pages | 13 |
| Journal | Microelectronic Engineering |
| Volume | 20 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - Mar 1993 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
Keywords
- Contamination
- Laser
- Particle
- Semiconductor