| Original language | English |
|---|---|
| Pages (from-to) | 6501-6505 |
| Number of pages | 5 |
| Journal | Journal of Applied Physics |
| Volume | 52 |
| Issue number | 11 |
| DOIs | |
| State | Published - 1981 |
| Externally published | Yes |
ASJC Scopus Subject Areas
- General Physics and Astronomy
Laser chemical vapor deposition: A technique for selective area deposition
Research output: Contribution to journal › Article › peer-review