Laser chemical vapor deposition: A technique for selective area deposition

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@article{06d68123e4074965b0137a4876c60a22,

title = "Laser chemical vapor deposition: A technique for selective area deposition",

author = "Allen, \{S. D.\}",

year = "1981",

doi = "10.1063/1.328600",

language = "English",

volume = "52",

pages = "6501--6505",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing LLC",

number = "11",

}

TY - JOUR

T1 - Laser chemical vapor deposition

T2 - A technique for selective area deposition

AU - Allen, S. D.

PY - 1981

Y1 - 1981

UR - https://www.scopus.com/pages/publications/0019634771

UR - https://www.scopus.com/pages/publications/0019634771#tab=citedBy

U2 - 10.1063/1.328600

DO - 10.1063/1.328600

M3 - Article

AN - SCOPUS:0019634771

SN - 0021-8979

VL - 52

SP - 6501

EP - 6505

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 11

ER -