Laser chemical vapor deposition of selected area Fe and W films

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@article{88fe75490b7148a4a5b5c694fe3649f3,

title = "Laser chemical vapor deposition of selected area Fe and W films",

author = "Allen, {S. D.} and Tringubo, {A. B.}",

year = "1983",

doi = "10.1063/1.332154",

language = "English",

volume = "54",

pages = "1641--1643",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "3",

}

TY - JOUR

T1 - Laser chemical vapor deposition of selected area Fe and W films

AU - Allen, S. D.

AU - Tringubo, A. B.

PY - 1983

Y1 - 1983

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UR - http://www.scopus.com/inward/citedby.url?scp=0020721275&partnerID=8YFLogxK

U2 - 10.1063/1.332154

DO - 10.1063/1.332154

M3 - Article

AN - SCOPUS:0020721275

SN - 0021-8979

VL - 54

SP - 1641

EP - 1643

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 3

ER -