Laser chemical vapor deposition using cw and pulsed lasers

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	25-30
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	346
DOIs	https://doi.org/10.1117/12.933787
State	Published - Sep 15 1982
Externally published	Yes

ASJC Scopus Subject Areas

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title = "Laser chemical vapor deposition using cw and pulsed lasers",

author = "Allen, \{Susan D.\}",

year = "1982",

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