Laser chemical vapor deposition−applications in materials processing

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	49-56
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	198
DOIs	https://doi.org/10.1117/12.958020
State	Published - Jan 24 1980
Externally published	Yes

ASJC Scopus Subject Areas

@article{23de2d8f0fa44ff9ab2ab4510b495782,

title = "Laser chemical vapor deposition−applications in materials processing",

author = "Allen, {S. D.}",

year = "1980",

month = jan,

day = "24",

doi = "10.1117/12.958020",

language = "English",

volume = "198",

pages = "49--56",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

}

TY - JOUR

T1 - Laser chemical vapor deposition−applications in materials processing

AU - Allen, S. D.

PY - 1980/1/24

Y1 - 1980/1/24

UR - http://www.scopus.com/inward/record.url?scp=0019206399&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0019206399&partnerID=8YFLogxK

U2 - 10.1117/12.958020

DO - 10.1117/12.958020

M3 - Article

AN - SCOPUS:0019206399

SN - 0277-786X

VL - 198

SP - 49

EP - 56

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -