Laser chemical vapor deposition−applications in materials processing

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	49-56
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	198
DOIs	https://doi.org/10.1117/12.958020
State	Published - Jan 24 1980
Externally published	Yes

ASJC Scopus Subject Areas

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title = "Laser chemical vapor deposition−applications in materials processing",

author = "Allen, \{S. D.\}",

year = "1980",

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JO - Proceedings of SPIE - The International Society for Optical Engineering

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