@inproceedings{ba03be418e9f46778683ca3dc8078efa,
title = "Laser cleaning of nano- to microcontaminants from critical silicon surfaces",
author = "Kudryashov, {S. I.} and S. Shukla and Allen, {S. D.}",
year = "2006",
language = "English",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "3",
pages = "33--40",
booktitle = "Cleaning Technology in Semiconductor Device Manufacturing IX",
edition = "3",
note = "9th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing - 2005 Fall Meeting of the Electrochemical Society ; Conference date: 16-10-2005 Through 21-10-2005",
}