Laser CVD using a CO2 TEA laser

S. D. Allen, Y. C. Liu

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Article numberWE6
JournalOptics InfoBase Conference Papers
StatePublished - 1982
Externally publishedYes
EventConference on Lasers and Electro-Optics, CLEO 1982 - Phoenix, United States
Duration: Apr 14 1982Apr 16 1982

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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