Laser micro-structuring of silicon in dry and wet environments

Sergey I. Kudryashov; Jacob M. Small; Susan D. Allen

doi:10.1117/12.587191

Laser micro-structuring of silicon in dry and wet environments

Sergey I. Kudryashov, Jacob M. Small, Susan D. Allen

Arkansas State University

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Article number	89
Pages (from-to)	618-628
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5713
DOIs	https://doi.org/10.1117/12.587191
State	Published - 2005
Externally published	Yes
Event	Photon Processing in Microelectronics and Photonics IV - San Jose, CA, United States Duration: Jan 24 2005 → Jan 27 2005

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Coulomb explosion
Explosive boiling
Kelvin-Helmholtz instabilities
Local enhancement of electromagnetic field
Micro-structures
ns and fs laser ablation
Photoacoustics
Silicon
Surface capillary waves
Water droplets

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10.1117/12.587191

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@article{91ebf44bc2514124a1fa7442376b47d0,

title = "Laser micro-structuring of silicon in dry and wet environments",

keywords = "Coulomb explosion, Explosive boiling, Kelvin-Helmholtz instabilities, Local enhancement of electromagnetic field, Micro-structures, ns and fs laser ablation, Photoacoustics, Silicon, Surface capillary waves, Water droplets",

author = "Kudryashov, {Sergey I.} and Small, {Jacob M.} and Allen, {Susan D.}",

year = "2005",

doi = "10.1117/12.587191",

language = "English",

volume = "5713",

pages = "618--628",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Photon Processing in Microelectronics and Photonics IV ; Conference date: 24-01-2005 Through 27-01-2005",

}

TY - JOUR

T1 - Laser micro-structuring of silicon in dry and wet environments

AU - Kudryashov, Sergey I.

AU - Small, Jacob M.

AU - Allen, Susan D.

PY - 2005

Y1 - 2005

KW - Coulomb explosion

KW - Explosive boiling

KW - Kelvin-Helmholtz instabilities

KW - Local enhancement of electromagnetic field

KW - Micro-structures

KW - ns and fs laser ablation

KW - Photoacoustics

KW - Silicon

KW - Surface capillary waves

KW - Water droplets

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U2 - 10.1117/12.587191

DO - 10.1117/12.587191

M3 - Conference article

AN - SCOPUS:23644455110

SN - 0277-786X

VL - 5713

SP - 618

EP - 628

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 89

T2 - Photon Processing in Microelectronics and Photonics IV

Y2 - 24 January 2005 through 27 January 2005

ER -

Laser micro-structuring of silicon in dry and wet environments

ASJC Scopus Subject Areas

Keywords

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