Laser repair of transparent microfaults in ic photomasks

H. P. Preiswerk, C. C. Sheu, S. D. Allen

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	71-75
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	621
DOIs	https://doi.org/10.1117/12.961148
State	Published - Aug 5 1986
Externally published	Yes

ASJC Scopus Subject Areas

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title = "Laser repair of transparent microfaults in ic photomasks",

author = "Preiswerk, {H. P.} and Sheu, {C. C.} and Allen, {S. D.}",

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AU - Sheu, C. C.

AU - Allen, S. D.

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