Laser repair of transparent microfaults in ic photomasks

H. P. Preiswerk; C. C. Sheu; S. D. Allen

doi:10.1117/12.961148

Laser repair of transparent microfaults in ic photomasks

H. P. Preiswerk, C. C. Sheu, S. D. Allen

University of Southern California

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	71-75
Number of pages	5
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	621
DOIs	https://doi.org/10.1117/12.961148
State	Published - Aug 5 1986
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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@article{1d15054a4edf4c5987503c3719408476,

title = "Laser repair of transparent microfaults in ic photomasks",

author = "Preiswerk, \{H. P.\} and Sheu, \{C. C.\} and Allen, \{S. D.\}",

year = "1986",

month = aug,

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doi = "10.1117/12.961148",

language = "English",

volume = "621",

pages = "71--75",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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publisher = "SPIE - International Society for Optical Engineering",

}

TY - JOUR

T1 - Laser repair of transparent microfaults in ic photomasks

AU - Preiswerk, H. P.

AU - Sheu, C. C.

AU - Allen, S. D.

PY - 1986/8/5

Y1 - 1986/8/5

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DO - 10.1117/12.961148

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AN - SCOPUS:0022898779

SN - 0277-786X

VL - 621

SP - 71

EP - 75

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Laser repair of transparent microfaults in ic photomasks

ASJC Scopus Subject Areas

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