New Advances and Steam Laser Cleaning of Opaque and Transparent Critical Substrates: With IR-Lasers to New Laser Cleaning Mechanism

Shishir Shukla, Sergey I. Kudryashov, Kevin Lyon, Susan D. Allen

Research output: Chapter in Book/Report/Conference proceedingChapter

Original languageAmerican English
Title of host publicationPhoton Processing in Microelectronics and Photonics V
StatePublished - Mar 2006
Externally publishedYes

Keywords

  • carbon monoxide
  • gas lasers
  • glasses
  • laser damage threshold
  • opacity

Disciplines

  • Physical Sciences and Mathematics

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