@inproceedings{8b89de91efbe47d9be15d8a6a9e34e4f,
title = "New advances and steam laser cleaning of opaque and transparent critical substrates: With IR-lasers to new laser cleaning mechanism",
keywords = "Cleaning mechanisms, De-ionized water, Dry and steam laser cleaning, Isopropyl alcohol, Nanosecond CO laser, Opaque and transparent critical substrates, Sub-micron and micron sized particles, Time-resolved optical microscopy",
author = "Shishir Shukla and Sergey Kudryashov and Kevin Lyon and Allen, {Susan D.}",
year = "2006",
doi = "10.1117/12.647017",
language = "English",
isbn = "0819461482",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Photon Processing in Microelectronics and Photonics V",
note = "Photon Processing in Microelectronics and Photonics V ; Conference date: 23-01-2006 Through 26-01-2006",
}