Original language | English |
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Pages (from-to) | 396-403 |
Number of pages | 8 |
Journal | Proceedings of SPIE - The International Society for Optical Engineering |
Volume | 3933 |
DOIs | |
State | Published - 2000 |
Externally published | Yes |
Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA Duration: Jan 24 2000 → Jan 26 2000 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering