| Original language | English |
|---|---|
| Pages (from-to) | 396-403 |
| Number of pages | 8 |
| Journal | Proceedings of SPIE - The International Society for Optical Engineering |
| Volume | 3933 |
| DOIs | |
| State | Published - 2000 |
| Externally published | Yes |
| Event | Laser Applications in Microelectronic and Optoelectronic Manufacturing V - San Jose, CA, USA Duration: Jan 24 2000 → Jan 26 2000 |
ASJC Scopus Subject Areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Computer Science Applications
- Applied Mathematics
- Electrical and Electronic Engineering