Optical and thermal effects in laser chemical vapor deposition

S. D. Allen; R. Y. Jan; R. H. Edwards; S. M. Mazuk; S. D. Vernon

doi:10.1117/12.939433

Optical and thermal effects in laser chemical vapor deposition

S. D. Allen, R. Y. Jan, R. H. Edwards, S. M. Mazuk, S. D. Vernon

University of Southern California

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	42-48
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	459
DOIs	https://doi.org/10.1117/12.939433
State	Published - Jun 14 1984
Externally published	Yes

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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title = "Optical and thermal effects in laser chemical vapor deposition",

author = "Allen, {S. D.} and Jan, {R. Y.} and Edwards, {R. H.} and Mazuk, {S. M.} and Vernon, {S. D.}",

year = "1984",

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doi = "10.1117/12.939433",

language = "English",

volume = "459",

pages = "42--48",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

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T1 - Optical and thermal effects in laser chemical vapor deposition

AU - Allen, S. D.

AU - Jan, R. Y.

AU - Edwards, R. H.

AU - Mazuk, S. M.

AU - Vernon, S. D.

PY - 1984/6/14

Y1 - 1984/6/14

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DO - 10.1117/12.939433

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AN - SCOPUS:0021596238

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VL - 459

SP - 42

EP - 48

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

ER -

Optical and thermal effects in laser chemical vapor deposition

ASJC Scopus Subject Areas

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