@article{8ae3f38c9bdc4c259361f3cb43e92819,
title = "Optical and thermal effects in laser chemical vapor deposition",
author = "Allen, \{S. D.\} and Jan, \{R. Y.\} and Edwards, \{R. H.\} and Mazuk, \{S. M.\} and Vernon, \{S. D.\}",
year = "1984",
month = jun,
day = "14",
doi = "10.1117/12.939433",
language = "English",
volume = "459",
pages = "42--48",
journal = "Proceedings of SPIE - The International Society for Optical Engineering",
issn = "0277-786X",
publisher = "SPIE - International Society for Optical Engineering",
}