Abstract
A photoacoustic study of KrF laser heating of Si has revealed that the dominant mechanism of acoustic generation is thermoacoustic with a considerable contribution from the concentration-deformation mechanism at laser fluences below the Si melting threshold of 0.5 J/cm 2 . Upon Si melting the contraction of the molten material contributes significantly to acoustic generation. At fluences above 1.4 J/cm 2 laser ablation of the molten layer enhances the amplitude of the compression pulse and diminishes that of the rarefaction pulse. The results of photoacoustic measurements allow optimization of experimental conditions for dry laser particle removal.
© 2002 American Institute of Physics.
| Original language | American English |
|---|---|
| Journal | Journal of Applied Physics |
| Volume | 92 |
| DOIs | |
| State | Published - Nov 15 2002 |
| Externally published | Yes |
Keywords
- acoustic generation
- compression pulse
- dominant mechanism
- experimental conditions
- fluences
- laser fluences
- laser particles
- melting threshold
- molten layers
- photoacoustic measurements
- rarefaction pulse
- thermoacoustic
- heating
- laser heating
- melting
- molten materials
- photoacoustic effect
- thermoacoustics
Disciplines
- Physics