Pulse CO/sub 2/ Laser Drilling of Green Alumina Ceramic

K. Imen; S. D. Allen

doi:10.1109/6040.803454

Pulse CO/sub 2/ Laser Drilling of Green Alumina Ceramic

K. Imen, S. D. Allen

Florida State University

Research output: Contribution to journal › Article › peer-review

Abstract

Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO/sub 2/ laser drilling of green alumina ceramic sheets consisting predominantly of alumina with approximately 10% PVB (polyvinyl butyral) as the polymer binder. Experiments with 9.5 and 10.6 /spl mu/m wavelengths show that the holes made with a 9.5 /spl mu/m CO/sub 2/ laser beam, where a larger percentage of the total laser energy is deposited directly into the polymer binder, are smaller, more straight-sided and cleaner.

Original language	American English
Journal	IEEE Transactions on Advanced Packaging
Volume	22
DOIs	https://doi.org/10.1109/6040.803454
State	Published - Nov 1999
Externally published	Yes

Keywords

optical pulses
drilling
ceramics
pulsed laser deposition
etching
polymers

Disciplines

Physical Sciences and Mathematics

Access to Document

10.1109/6040.803454License: Unspecified

Cite this

@article{b9611af9f17b4540974811d6dd5825fa,

title = "Pulse CO/sub 2/ Laser Drilling of Green Alumina Ceramic",

abstract = " Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO/sub 2/ laser drilling of green alumina ceramic sheets consisting predominantly of alumina with approximately 10% PVB (polyvinyl butyral) as the polymer binder. Experiments with 9.5 and 10.6 /spl mu/m wavelengths show that the holes made with a 9.5 /spl mu/m CO/sub 2/ laser beam, where a larger percentage of the total laser energy is deposited directly into the polymer binder, are smaller, more straight-sided and cleaner.",

keywords = "optical pulses, drilling, ceramics, pulsed laser deposition, etching, polymers",

author = "K. Imen and Allen, {S. D.}",

note = "Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO/sub 2/ laser drilling of gre",

year = "1999",

month = nov,

doi = "10.1109/6040.803454",

language = "American English",

volume = "22",

journal = "IEEE Transactions on Advanced Packaging",

issn = "1557-9980",

}

TY - JOUR

T1 - Pulse CO/sub 2/ Laser Drilling of Green Alumina Ceramic

AU - Imen, K.

AU - Allen, S. D.

N1 - Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO/sub 2/ laser drilling of gre

PY - 1999/11

Y1 - 1999/11

N2 - Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO/sub 2/ laser drilling of green alumina ceramic sheets consisting predominantly of alumina with approximately 10% PVB (polyvinyl butyral) as the polymer binder. Experiments with 9.5 and 10.6 /spl mu/m wavelengths show that the holes made with a 9.5 /spl mu/m CO/sub 2/ laser beam, where a larger percentage of the total laser energy is deposited directly into the polymer binder, are smaller, more straight-sided and cleaner.

AB - Ceramics are used as thermal conductors and electrical insulators in integrated circuit packaging. We have investigated TEA CO/sub 2/ laser drilling of green alumina ceramic sheets consisting predominantly of alumina with approximately 10% PVB (polyvinyl butyral) as the polymer binder. Experiments with 9.5 and 10.6 /spl mu/m wavelengths show that the holes made with a 9.5 /spl mu/m CO/sub 2/ laser beam, where a larger percentage of the total laser energy is deposited directly into the polymer binder, are smaller, more straight-sided and cleaner.

KW - optical pulses

KW - drilling

KW - ceramics

KW - pulsed laser deposition

KW - etching

KW - polymers

UR - https://ieeexplore.ieee.org/document/803454/

U2 - 10.1109/6040.803454

DO - 10.1109/6040.803454

M3 - Article

SN - 1557-9980

VL - 22

JO - IEEE Transactions on Advanced Packaging

JF - IEEE Transactions on Advanced Packaging

ER -

Pulse CO/sub 2/ Laser Drilling of Green Alumina Ceramic

Abstract

Keywords

Disciplines

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