Pulsed laser cleaning of sub- And micron-size contaminant particles from optical surfaces: Cleaning vs. ablation and damage

Shishir Shukla; Sergey Kudryashov; Kevin Lyon; Susan D. Allen

doi:10.1117/12.638820

Pulsed laser cleaning of sub- And micron-size contaminant particles from optical surfaces: Cleaning vs. ablation and damage

Shishir Shukla, Sergey Kudryashov, Kevin Lyon, Susan D. Allen

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Article number	59910N
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5991
DOIs	https://doi.org/10.1117/12.638820
State	Published - 2005
Externally published	Yes
Event	37th Annual Boulder Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2005 - Boulder, CO, United States Duration: Sep 19 2005 → Sep 21 2005

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

CO laser
Fused silica
Glass substrate
Isopropanol
Sub-micron and micron sized particles

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10.1117/12.638820

Cite this

@article{8276c486f6f045cabfa73f89363ce693,

title = "Pulsed laser cleaning of sub- And micron-size contaminant particles from optical surfaces: Cleaning vs. ablation and damage",

keywords = "CO laser, Fused silica, Glass substrate, Isopropanol, Sub-micron and micron sized particles",

author = "Shishir Shukla and Sergey Kudryashov and Kevin Lyon and Allen, \{Susan D.\}",

year = "2005",

doi = "10.1117/12.638820",

language = "English",

volume = "5991",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE - International Society for Optical Engineering",

note = "37th Annual Boulder Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2005 ; Conference date: 19-09-2005 Through 21-09-2005",

}

TY - JOUR

T1 - Pulsed laser cleaning of sub- And micron-size contaminant particles from optical surfaces

T2 - 37th Annual Boulder Damage Symposium Proceedings - Laser-Induced Damage in Optical Materials: 2005

AU - Shukla, Shishir

AU - Kudryashov, Sergey

AU - Lyon, Kevin

AU - Allen, Susan D.

PY - 2005

Y1 - 2005

KW - CO laser

KW - Fused silica

KW - Glass substrate

KW - Isopropanol

KW - Sub-micron and micron sized particles

UR - https://www.scopus.com/pages/publications/33644609888

UR - https://www.scopus.com/inward/citedby.url?scp=33644609888&partnerID=8YFLogxK

U2 - 10.1117/12.638820

DO - 10.1117/12.638820

M3 - Conference article

AN - SCOPUS:33644609888

SN - 0277-786X

VL - 5991

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 59910N

Y2 - 19 September 2005 through 21 September 2005

ER -

Pulsed laser cleaning of sub- And micron-size contaminant particles from optical surfaces: Cleaning vs. ablation and damage

ASJC Scopus Subject Areas

Keywords

Access to Document

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