Pulsed selective laser removal of nano- and micro-particles

Shishir Shukla; Sergey I. Kudryashov; Kevin Lyon; Susan D. Allen

doi:10.1117/12.647056

Pulsed selective laser removal of nano- and micro-particles

Shishir Shukla, Sergey I. Kudryashov, Kevin Lyon, Susan D. Allen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Proceedings of SPIE - The International Society for Optical Engineering
DOIs	https://doi.org/10.1117/12.647056
State	Published - 2006
Externally published	Yes
Event	Laser-based Micropackaging - San Jose, CA, United States Duration: Jan 25 2006 → Jan 26 2006

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	6107
ISSN (Print)	0277-786X

Conference

Conference	Laser-based Micropackaging
Country/Territory	United States
City	San Jose, CA
Period	1/25/06 → 1/26/06

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

De-ionized water
Isopropyl alcohol
Nanosecond CO laser
Selective laser cleaning
Sub-micron and micron sized particles

Access to Document

10.1117/12.647056

Cite this

Pulsed selective laser removal of nano- and micro-particles. / Shukla, Shishir; Kudryashov, Sergey I.; Lyon, Kevin et al.
Proceedings of SPIE - The International Society for Optical Engineering. 2006. 61070S (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 6107).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Shukla, S, Kudryashov, SI, Lyon, K & Allen, SD 2006, Pulsed selective laser removal of nano- and micro-particles. in Proceedings of SPIE - The International Society for Optical Engineering., 61070S, Proceedings of SPIE - The International Society for Optical Engineering, vol. 6107, Laser-based Micropackaging, San Jose, CA, United States, 1/25/06. https://doi.org/10.1117/12.647056

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title = "Pulsed selective laser removal of nano- and micro-particles",

keywords = "De-ionized water, Isopropyl alcohol, Nanosecond CO laser, Selective laser cleaning, Sub-micron and micron sized particles",

author = "Shishir Shukla and Kudryashov, {Sergey I.} and Kevin Lyon and Allen, {Susan D.}",

year = "2006",

doi = "10.1117/12.647056",

language = "English",

isbn = "0819461490",

series = "Proceedings of SPIE - The International Society for Optical Engineering",

booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",

note = "Laser-based Micropackaging ; Conference date: 25-01-2006 Through 26-01-2006",

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T1 - Pulsed selective laser removal of nano- and micro-particles

AU - Shukla, Shishir

AU - Kudryashov, Sergey I.

AU - Lyon, Kevin

AU - Allen, Susan D.

PY - 2006

Y1 - 2006

KW - De-ionized water

KW - Isopropyl alcohol

KW - Nanosecond CO laser

KW - Selective laser cleaning

KW - Sub-micron and micron sized particles

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DO - 10.1117/12.647056

M3 - Conference contribution

AN - SCOPUS:33645962189

SN - 0819461490

SN - 9780819461490

T3 - Proceedings of SPIE - The International Society for Optical Engineering

BT - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Laser-based Micropackaging

Y2 - 25 January 2006 through 26 January 2006

ER -

Pulsed selective laser removal of nano- and micro-particles

Publication series

Conference

ASJC Scopus Subject Areas

Keywords

Access to Document

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Cite this