Real time measurement of deposition initiation and rate in laser chemical vapor deposition

S. D. Allen; R. Y. Jan; S. M. Mazuk; S. D. Vernon

doi:10.1063/1.335680

Real time measurement of deposition initiation and rate in laser chemical vapor deposition

S. D. Allen, R. Y. Jan, S. M. Mazuk, S. D. Vernon

University of Southern California

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	327-331
Number of pages	5
Journal	Journal of Applied Physics
Volume	58
Issue number	1
DOIs	https://doi.org/10.1063/1.335680
State	Published - 1985
Externally published	Yes

ASJC Scopus Subject Areas

General Physics and Astronomy

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title = "Real time measurement of deposition initiation and rate in laser chemical vapor deposition",

author = "Allen, {S. D.} and Jan, {R. Y.} and Mazuk, {S. M.} and Vernon, {S. D.}",

year = "1985",

doi = "10.1063/1.335680",

language = "English",

volume = "58",

pages = "327--331",

journal = "Journal of Applied Physics",

issn = "0021-8979",

number = "1",

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T1 - Real time measurement of deposition initiation and rate in laser chemical vapor deposition

AU - Allen, S. D.

AU - Jan, R. Y.

AU - Mazuk, S. M.

AU - Vernon, S. D.

PY - 1985

Y1 - 1985

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DO - 10.1063/1.335680

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SP - 327

EP - 331

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -

Real time measurement of deposition initiation and rate in laser chemical vapor deposition

ASJC Scopus Subject Areas

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