Selected Area Processing

Thomas M. Mayer; Susan D. Allen

doi:10.1016/B978-0-08-052421-4.50001-0

Selected Area Processing

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.

Original language	American English
Title of host publication	Thin Film Processes II
DOIs	https://doi.org/10.1016/B978-0-08-052421-4.50001-0
State	Published - 1991
Externally published	Yes

Keywords

thin films
etching processes

Disciplines

Chemistry
Engineering Physics

Access to Document

10.1016/B978-0-08-052421-4.50001-0License: Unspecified

Cite this

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title = "Selected Area Processing",

abstract = " This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.",

keywords = "thin films, etching processes",

author = "Mayer, {Thomas M.} and Allen, {Susan D.}",

year = "1991",

doi = "10.1016/B978-0-08-052421-4.50001-0",

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AU - Allen, Susan D.

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AB - This sequel to the 1978 classic, Thin Film Processes, gives a clear, practical exposition of important thin film deposition and etching processes that have not yet been adequately reviewed. It discusses selected processes in tutorial overviews with implementation guide lines and an introduction to the literature. Though edited to stand alone, when taken together, Thin Film Processes II and its predecessor present a thorough grounding in modern thin film techniques.

KW - thin films

KW - etching processes

U2 - 10.1016/B978-0-08-052421-4.50001-0

DO - 10.1016/B978-0-08-052421-4.50001-0

M3 - Chapter

BT - Thin Film Processes II

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