Spot size effects in laser chemical vapor deposition

S. D. Allen, R. Y. Jan

Research output: Contribution to journalConference articlepeer-review

Original languageEnglish
Article numberTUA5
JournalOptics InfoBase Conference Papers
StatePublished - 1983
Externally publishedYes
EventConference on Lasers and Electro-Optics, CLEO 1983 - Baltimore, United States
Duration: May 17 1983May 20 1983

ASJC Scopus Subject Areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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