Summary abstract: Optical monitoring of laser heating and interfacial reaction in si/au

J. C. Su; Q. K. Meng; S. D. Allen

doi:10.1116/1.574582

Summary abstract: Optical monitoring of laser heating and interfacial reaction in si/au

J. C. Su, Q. K. Meng, S. D. Allen

University of Southern California

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	1480-1481
Number of pages	2
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	5
Issue number	4
DOIs	https://doi.org/10.1116/1.574582
State	Published - Jul 1 1987
Externally published	Yes

ASJC Scopus Subject Areas

Condensed Matter Physics
Surfaces and Interfaces
Surfaces, Coatings and Films

Access to Document

10.1116/1.574582

Cite this

@article{c726b1a3f1684d08ae899e41bacafa2b,

title = "Summary abstract: Optical monitoring of laser heating and interfacial reaction in si/au",

author = "Su, {J. C.} and Meng, {Q. K.} and Allen, {S. D.}",

year = "1987",

month = jul,

day = "1",

doi = "10.1116/1.574582",

language = "English",

volume = "5",

pages = "1480--1481",

journal = "Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",

issn = "0734-2101",

number = "4",

}

TY - JOUR

T1 - Summary abstract

T2 - Optical monitoring of laser heating and interfacial reaction in si/au

AU - Su, J. C.

AU - Meng, Q. K.

AU - Allen, S. D.

PY - 1987/7/1

Y1 - 1987/7/1

UR - http://www.scopus.com/inward/record.url?scp=84948508000&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84948508000&partnerID=8YFLogxK

U2 - 10.1116/1.574582

DO - 10.1116/1.574582

M3 - Article

AN - SCOPUS:84948508000

SN - 0734-2101

VL - 5

SP - 1480

EP - 1481

JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 4

ER -

Summary abstract: Optical monitoring of laser heating and interfacial reaction in si/au

ASJC Scopus Subject Areas

Access to Document

Other files and links

Cite this