Surface analysis by laser induced desorption time-of-flight mass spectrometry

S. D. Allen; J. M. Fu; Y. Surapaneni; A. J. Hopkins; P. S. Davis

doi:10.1117/12.479418

Surface analysis by laser induced desorption time-of-flight mass spectrometry

S. D. Allen, J. M. Fu, Y. Surapaneni, A. J. Hopkins, P. S. Davis

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	1-9
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4977
DOIs	https://doi.org/10.1117/12.479418
State	Published - 2003
Externally published	Yes
Event	PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II - San Jose, CA, United States Duration: Jan 27 2003 → Jan 30 2003

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Contaminant
Laser induced desorption
Surface analysis
Time-of-flight mass spectrometer

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10.1117/12.479418

Cite this

@article{9db6b4f9d3844be7ad052c2ab95a65d0,

title = "Surface analysis by laser induced desorption time-of-flight mass spectrometry",

keywords = "Contaminant, Laser induced desorption, Surface analysis, Time-of-flight mass spectrometer",

author = "Allen, {S. D.} and Fu, {J. M.} and Y. Surapaneni and Hopkins, {A. J.} and Davis, {P. S.}",

year = "2003",

doi = "10.1117/12.479418",

language = "English",

volume = "4977",

pages = "1--9",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II ; Conference date: 27-01-2003 Through 30-01-2003",

}

TY - JOUR

T1 - Surface analysis by laser induced desorption time-of-flight mass spectrometry

AU - Allen, S. D.

AU - Fu, J. M.

AU - Surapaneni, Y.

AU - Hopkins, A. J.

AU - Davis, P. S.

PY - 2003

Y1 - 2003

KW - Contaminant

KW - Laser induced desorption

KW - Surface analysis

KW - Time-of-flight mass spectrometer

UR - http://www.scopus.com/inward/record.url?scp=0345724921&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0345724921&partnerID=8YFLogxK

U2 - 10.1117/12.479418

DO - 10.1117/12.479418

M3 - Conference article

AN - SCOPUS:0345724921

SN - 0277-786X

VL - 4977

SP - 1

EP - 9

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Photon Processing in Microelectronics and Photonics II

Y2 - 27 January 2003 through 30 January 2003

ER -

Surface analysis by laser induced desorption time-of-flight mass spectrometry

ASJC Scopus Subject Areas

Keywords

Access to Document

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