@inproceedings{ca5905451b4c459a89729976ead467d0,
title = "Threshold measurements in laser-assisted particle removal (Invited Paper)",
author = "Lee, {Shyan J.} and Kamran Imen and Allen, {Susan D.}",
year = "1991",
language = "English",
isbn = "0819407291",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Publ by Int Soc for Optical Engineering",
pages = "2--12",
editor = "Bodil Braren",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Lasers in Microelectronic Manufacturing ; Conference date: 10-09-1991 Through 11-09-1991",
}