@inproceedings{e570d097a083474485d11ed4a78aa71b,
title = "Ultra-deep plasma-assisted drilling of solids by high-power nanosecond lasers: Experimental studies",
keywords = "Dielectric materials, High-power nanosecond lasers, Multi-micron deep drilling, Photoacoustic and optical monitoring and characterization, Short-wavelength plasma radiation, Silicon",
author = "Stanley Paul and Kevin Lyon and Kudryashov, {Sergey I.} and Allen, {Susan D.}",
year = "2006",
doi = "10.1117/12.647003",
language = "English",
isbn = "0819461490",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Laser-based Micropackaging ; Conference date: 25-01-2006 Through 26-01-2006",
}