Viscous drag force effect on transportation of sub-micron particle contaminants during dry and steam laser cleaning

Sergey I. Kudryashov; Susan D. Allen

doi:10.1117/12.587101

Viscous drag force effect on transportation of sub-micron particle contaminants during dry and steam laser cleaning

Sergey I. Kudryashov, Susan D. Allen

Arkansas State University

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Article number	75
Pages (from-to)	528-538
Number of pages	11
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5713
DOIs	https://doi.org/10.1117/12.587101
State	Published - 2005
Externally published	Yes
Event	Photon Processing in Microelectronics and Photonics IV - San Jose, CA, United States Duration: Jan 24 2005 → Jan 27 2005

ASJC Scopus Subject Areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Keywords

Critical surfaces
Dry and steam laser cleaning
Microelectronics
Nano- and micro-contaminants

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10.1117/12.587101

Cite this

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title = "Viscous drag force effect on transportation of sub-micron particle contaminants during dry and steam laser cleaning",

keywords = "Critical surfaces, Dry and steam laser cleaning, Microelectronics, Nano- and micro-contaminants",

author = "Kudryashov, {Sergey I.} and Allen, {Susan D.}",

year = "2005",

doi = "10.1117/12.587101",

language = "English",

volume = "5713",

pages = "528--538",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

note = "Photon Processing in Microelectronics and Photonics IV ; Conference date: 24-01-2005 Through 27-01-2005",

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TY - JOUR

T1 - Viscous drag force effect on transportation of sub-micron particle contaminants during dry and steam laser cleaning

AU - Kudryashov, Sergey I.

AU - Allen, Susan D.

PY - 2005

Y1 - 2005

KW - Critical surfaces

KW - Dry and steam laser cleaning

KW - Microelectronics

KW - Nano- and micro-contaminants

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DO - 10.1117/12.587101

M3 - Conference article

AN - SCOPUS:23644436011

SN - 0277-786X

VL - 5713

SP - 528

EP - 538

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

M1 - 75

T2 - Photon Processing in Microelectronics and Photonics IV

Y2 - 24 January 2005 through 27 January 2005

ER -

Viscous drag force effect on transportation of sub-micron particle contaminants during dry and steam laser cleaning

ASJC Scopus Subject Areas

Keywords

Access to Document

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